Devices EZR32HG Series EZR32HG Series Silicon Labs Devices 28 EZR32HG320F64R55 EZR32HG320 Cortex-M0+ EZR32HG320F64R60 EZR32HG320 Cortex-M0+ EZR32HG320F64R61 EZR32HG320 Cortex-M0+ EZR32HG320F64R63 EZR32HG320 Cortex-M0+ EZR32HG320F64R67 EZR32HG320 Cortex-M0+ EZR32HG320F64R68 EZR32HG320 Cortex-M0+ EZR32HG320F64R69 EZR32HG320 Cortex-M0+ 1 2